Process for manufacturing organic electroluminescent device

ABSTRACT

A method for producing an organic electroluminescent device, which is provided with first electrodes formed on a substrate, a thin film layer formed on the first electrode containing at least an emitting layer composed of an organic compound and a plurality of second electrodes formed on the thin film layer, and has a plurality of luminescent regions on said substrate, comprising the steps of forming spacers having a height at least partially exceeding the thickness of said thin film layer on the substrate, and vapor-depositing a deposit for patterning while the shadow mask having reinforcing lines formed across its apertures is kept in contact with said spacers.  
     Highly precise fine patterning can be effected under wide vapor deposition conditions without degrading the properties of organic electroluminescent elements, and high stability can be achieved by a relatively simple process without limiting the structure of the electroluminescent device.

TECHNICAL FIELDS

[0001] The present invention relates to a method for producing anorganic electroluminescent device having a plurality of luminescentregions of organic electroluminescent elements on one substrate, whichcan be used in such fields as display elements, flat panel displays,back lights and the interior.

BACKGROUND ART

[0002] In recent years, organic electroluminescent elements attractattention as new luminescent elements. In this element, the holesinjected from an anode and the electrons injected from a cathode arerecombined in an organic emitting layer held between both theelectrodes, and C. W. Tang et al. of Kodak demonstrated for the firsttime that it emitted light at a high luminance at a low voltage (App.Phys. Lett. 51 (12) 21, p. 913, 1987).

[0003]FIG. 37 is a sectional view showing a typical structure of anorganic electroluminescent element. A hole transport layer 5, an organicemitting layer 6 and second electrodes (cathodes) 8 are laminated ontransparent first electrodes (anodes) 2 formed on a glass substrate 1,and the light emitted due to the drive by a drive source 9 is takenoutside through the first electrodes and the glass substrate. Suchorganic electroluminescent elements, with a thin thickness and under lowvoltage driving, can emit light at a high luminance and also allowmulticolored luminescence by selecting organic luminescent materials.Their application as electroluminescent devices such as display elementsand displays is being actively studied.

[0004] In these case, for example, in a passive matrix type colordisplay as shown in FIGS. 1 to 3, a technique for highly preciselypatterning at least an organic emitting layer and second electrodes isneeded, and in an active matrix type color display, a technique forhighly precisely patterning at least an organic emitting layer isneeded.

[0005] For such fine patterning, photolithography is conventionally usedas a wet process. Japanese Patent Laid-Open (Kokai) No. Hei6-234969discloses a technique for obtaining an element to allow application ofphotolithography by devising an organic material.

[0006] As methods for patterning the second electrodes without using anywet process, Japanese Patent Laid-Open (Kokai) Nos. Hei5-275172 andHei8-315981 disclose partition techniques. In the technique of JapanesePatent Laid-Open (Kokai) No. Hei5-275172, partitions are arranged withintervals on a substrate, and an electrodes material is vapor-depositedon the substrate in an oblique direction. In the technique of JapanesePatent Laid-Open (Kokai) No. Hei8-315981, partitions with overhangs areformed on a substrate, and an electrode material is vapor-deposited onthe substrate from within an angle range with the vertical direction asthe center.

[0007] The conventional masking methods are general patterning methodswithout using any wet process. In these methods, a shadow mask isarranged before a substrate, and a deposit is vapor-deposited throughapertures for patterning.

[0008] As a fine patterning method by masking, Japanese Patent Laid-Open(Kokai) No. Hei9-115672 discloses a masking technique using a shadowmask with a single layer structure. In this method, a shadow mask widerin mask portion than in aperture width is used for patterning an organicthin film layer and second electrodes for each luminescent color, toallow the production of a practical pitch passive matrix type colordisplay.

[0009] On the other hand, though not relating to the method forproducing an organic electroluminescent device, Japanese PatentPublication (Kokoku) No. Sho63-38421 discloses a technique for forming awiring pattern by using a shadow mask with a laminate structure. In thismethod, a two-layer shadow mask consisting of meshes and a foil with apattern formed, either of which is a magnetic material, is kept incontact with a substrate by a magnet, for vapor deposition. Since themeshes inhibit the deformation of apertures, a complicated wiringpattern such as a cyclic circuit portion and a curved thin circuitportion can be formed.

DISCLOSURE OF THE INVENTION

[0010] However, the above mentioned conventional methods have thefollowing problems.

[0011] According to said photolithographic method, since the organicthin film layer used as a component of an organic electroluminescentelement is generally poor in the durability against water, organicsolvents and chemical solutions, the performance of the organicelectroluminescent element is remarkably degraded. Furthermore, toobtain an organic electroluminescent element allowing the application ofa wet process, the materials used are limited.

[0012] According to the partition methods, since patterning is achievedby using the shadows of the deposit formed by partitions, highly precisepatterning cannot be achieved when vapor deposition is effected atvarious angles or when vapor strays behind the partitions in a largequantity. So, these methods are not suitable for larger substrate areas,higher vapor deposition rates or more highly precise patterning.Furthermore, since regions free from the second electrodes called deadspaces corresponding to the shadows of the deposit exist on the organicthin film layer, the organic electroluminescent element tends to bedeteriorated by the invasion of water, etc. from there. Moreover, it isnot easy to stably form partitions with a large sectional aspect ratioand specially formed partitions with overhangs on the entire surface ofthe substrate.

[0013] In the conventional masking methods, the vapor strays due to thepoor contact between the substrate and the shadow mask. Especially whena shadow mask extremely narrow in the mask portion compared to theapertures is used, for example, for patterning second electrodes formedin stripes, the apertures can be deformed due to insufficient strengthof the shadow mask. So, it is difficult to highly precisely achieve thefine patterning in sub-millimeter ranges required for displays, etc.

[0014] In the masking method using a shadow mask with a single layerstructure, though the mask portion is relatively wide, the problem thatthe apertures are deformed cannot be solved, and patterning at highaccuracy cannot be achieved yet. Furthermore, since the organic thinfilm layer and the second electrodes are laminated in the same flatform, a plurality of electrode material evaporation steps are necessaryfor forming the second electrodes, and in addition, the element obtainedcan be applied only as a display structure in which the secondelectrodes can function as a data line.

[0015] The masking method using a shadow mask with a laminate structurecannot be applied for forming a fine pattern of sub-millimeter rangessince the conventional wiring patterns are generally formed inmillimeter ranges. Furthermore, since a shadow mask prepared by placinga patterned foil on highly rough meshes is used, the shadow mask is notsufficient in flatness or accuracy, and it is difficult to highlyprecisely achieve a fine pattern disadvantageously. Furthermore, sincethis method forcibly keeps the shadow mask in contact with the substrateby a magnet, the shadow mask easily flaws the organic thin film layerwhen the organic thin film layer on which the second electrodes areformed is very soft compared to a ceramic substrate, etc. So, since anundesirable accident such as shortcircuiting between the firstelectrodes and the second electrodes can occur, this method cannot beapplied for patterning in an organic electroluminescent device.

[0016] As described above, according to the prior arts, it is difficultto highly precisely and stably achieve the fine patterning necessary forproduction of an organic electroluminescent device, without damaging theorganic thin film layer.

[0017] The object of the present invention is to solve the aboveproblems by providing a method for producing an organicelectroluminescent device which allows highly precise fine patterningunder various vapor deposition conditions without degrading theproperties of the organic electroluminescent elements and can achievehigh stability by a relatively simple process without limiting thestructure of the electroluminescent device.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018]FIG. 1 is a plan view showing an example of the organicelectroluminescent device produced according to the present invention.

[0019]FIG. 2 is a sectional view along I-I′ of FIG. 1.

[0020]FIG. 3 is a sectional view along II-II′ of FIG. 1.

[0021]FIG. 4 is a plan view showing an example of the shadow mask usedin the present invention.

[0022]FIG. 5 is a sectional view along I-I′ of FIG. 4.

[0023]FIG. 6 is a sectional view along I-I′ for illustrating an exampleof the second electrode patterning method in the present invention.

[0024]FIG. 7 is a sectional view along II-II′ for illustrating anexample of the second electrode patterning method in the presentinvention (side view of FIG. 6).

[0025]FIG. 8 is a plan view showing an example of the first electrodepattern.

[0026]FIG. 9 is a plan view showing an example of the spacers formed inthe present invention.

[0027]FIG. 10 is a plan view showing another example of the organicelectroluminescent device produced according to the present invention.

[0028]FIG. 11 is a sectional view along I-I′ of FIG. 10.

[0029]FIG. 12 is a sectional view along II-II′ of FIG. 10.

[0030]FIG. 13 is a plan view showing a further other example of theorganic electroluminescent device produced according to the presentinvention.

[0031]FIG. 14 is a sectional view along I-I′ of FIG. 13.

[0032]FIG. 15 is a sectional view along II-II′ of FIG. 13.

[0033]FIG. 16 is a sectional view along I-I′ for illustrating a methodfor forming the hole transport layer.

[0034]FIG. 17 is a plan view showing another example of the shadow maskused in the present invention.

[0035]FIG. 18 is a sectional view along I-I′ for illustrating an exampleof the emitting layer patterning method in the present invention.

[0036]FIG. 19 is a sectional view along II-II′ for illustrating anexample of the emitting layer patterning method in the present invention(side view of FIG. 18).

[0037]FIG. 20 is a plan view showing an example of the emitting layerpatterned in the present invention.

[0038]FIG. 21 is a sectional view along I-I′ for illustrating a methodfor forming the electron transport layer.

[0039]FIG. 22 is a sectional view along I-I′ showing another example ofthe electron transport layer patterned in the present invention.

[0040]FIG. 23 is a sectional view along III-III′ of FIG. 4.

[0041]FIG. 24 is a sectional view along III-III′ showing a further otherexample of the shadow mask used in the present invention.

[0042]FIG. 25 is a sectional view along III-III′ showing a still furtherother example of the shadow mask used in the present invention.

[0043]FIG. 26 is a plan view showing a still further other example ofthe shadow mask used in the present invention.

[0044]FIG. 27 is a sectional view along I-I′ showing another example ofthe second electrode patterning method in the present invention.

[0045]FIG. 28 is a sectional view along II-II′ for illustrating anotherexample of the second electrode patterning method in the presentinvention (side view of FIG. 27).

[0046]FIG. 29 is a sectional view along III-III′ showing an example ofthe shadow mask with cushion portions used in the present invention.

[0047]FIG. 30 is a plan view showing the shadow mask for secondelectrode patterning used in Example 1.

[0048]FIG. 31 is a sectional view along I-I′ of FIG. 30.

[0049]FIG. 32 is a plan view showing the organic electroluminescentdevice produced in Example 1.

[0050]FIG. 33 is a sectional view along I-I′ of FIG. 32.

[0051]FIG. 34 is a sectional view along II-II′ of FIG. 32.

[0052]FIG. 35 is a plan view for illustrating the method for producingthe shadow mask for emitting layer patterning used in the examples.

[0053]FIG. 36 is sectional views for illustrating the method forproducing the shadow mask for second electrode patterning used in theexamples.

[0054]FIG. 37 is a sectional view showing an example of the conventionalorganic electroluminescent element.

THE MOST PREFERRED EMBODIMENTS OF THE INVENTION

[0055] The object described above can be achieved by the presentinvention described below.

[0056] The present invention is a method for producing an organicelectroluminescent device, which is provided with first electrodesformed on a substrate, a thin film layer formed on the first electrodecontaining at least an emitting layer composed of an organic compound,and a plurality of second electrodes formed on the thin film layer, andhas a plurality of luminescent regions on said substrate, comprising thesteps of forming spacers having a height at least partially exceedingthe thickness of said thin film layer, on the substrate, andvapor-depositing a material for patterning while a shadow mask havingreinforcing lines formed across its apertures is kept in contact withsaid spacers.

[0057] The organic electroluminescent device in the present inventionhas a plurality of luminescent regions of organic electroluminescentelements on one substrate. The organic electroluminescent deviceproduced according to the production method of the present invention isdescribed below. However, the production method of the present inventionis not limited to the organic electroluminescent devices of the typesand structures illustrated in this specification, and can be applied toorganic electroluminescent devices with desired structures irrespectiveof types such as segment type, passive matrix type and active matrixtype and irrespective of the number of luminescent colors such asmulticolor type and monochromatic type.

[0058] An example of the organic electroluminescent device producedaccording to the production method of the present invention is shown inFIGS. 1 to 3. First electrodes 2 formed in stripes on a substrate 1, athin film layer 10 containing an emitting layer 6 composed of an organiccompound patterned on the first electrode, and second electrodes 8formed in stripes in the direction perpendicular to the first electrodesare laminated on the substrate 1, to form a plurality of luminescentregions with organic electroluminescent element structures at theintersections between both the first and second electrodes. Since therespective luminescent regions can emit limit in red (R), green (G) andblue (B) by using different materials for the emitting layer, thepassive matrix type electroluminescent device can be drivenline-scanningly to display an image, etc. in color. Furthermore, on thesubstrate, spacers 4 with a height exceeding the thickness of the thinfilm layer are formed.

[0059] The first and second electrodes are only required to beelectrically conductive to allow sufficient supply of electric currentfor luminescence of the organic electroluminescent elements, but it ispreferable that at least either the first or second electrodes aretransparent for taking out light.

[0060] If the transparent electrodes have a visible light transmittanceof 30% or more, they can be used without any large problem, but it isideally preferable that the transmittance is close to 100%. Basically itis preferable that the electrodes have similar transmittance over theentire visible light range. If it is wished to change the luminescentcolor, the electrodes can also be made positively photoabsorbable. Inthis case, any color change method by use of a color filter orinterference filter is technically easy. The transparent electrodematerial often used is at least one element selected from indium, tin,gold, silver, zinc, aluminum, chromium, nickel, oxygen, nitrogen,hydrogen, argon and carbon, but inorganic conductive materials such ascopper iodide and copper sulfide and conductive polymers such aspolythiophene, polypyrrole and polyaniline can also be used. Thematerial used is not especially limited.

[0061] Preferable materials for the first electrodes include tin oxide,zinc oxide, indium oxide, indium tin oxide (ITO), etc. to be formed on atransparent substrate. For application as a display, etc. requiringpatterning, it is especially preferable to use ITO excellent inprocessability for the first electrodes. For higher electricconductivity, ITO can contain a small amount of a metal such as silveror gold. Furthermore, tin, gold, silver, zinc, indium, aluminum,chromium and nickel can also be used as guide electrodes of ITO. Aboveall, chromium is a preferable guide electrode material since it can haveboth the functions of black matrix and guide electrodes. In view of thepower consumption of the organic electroluminescent device, it ispreferable that the resistance of ITO is low. An ITO substrate of 300Ω/sq. or less can function as first electrodes, but since an ITOsubstrate of about 10 Ω/sq. can be easily supplied at present, a lowresistance material can also be used. The thickness of ITO can beselected as desired to suit the resistance value, but usually, 100 to300 nm thick ITO is often used. The material of the transparentsubstrate is not especially limited, and a plastic sheet or film made ofa polyacrylate, polycarbonate, polyester, polyimide or aramid can beused. A preferable material is a glass sheet. Soda lime glass, no-alkaliglass, etc. can be used, and the thickness required is 0.5 mm or moresince the thickness is only required to be enough to keep the mechanicalstrength. As for the material of glass, since it is better that theamount of ions dissolved from the glass is smaller, no-alkali glass ispreferable, but the marketed soda lime glass coated with silicondioxide, etc. as a barrier can also be used. The method for forming ITOis not especially limited, and can be selected from electron beamevaporation, sputtering evaporation, chemical reaction, etc.

[0062] The second electrode material is not especially limited either.When ITO is used as the first electrodes, the second electrodes arerequired to function as cathodes to allow efficient injection ofelectrons into the organic electroluminescent elements since ITOfunctions generally as anodes. Therefore, as the second electrodematerial, a low work function metal such as an alkali metal can also beused, but considering the stability of electrodes, it is preferable touse a metal such as platinum, gold, silver, copper, iron, tin, aluminum,magnesium or indium, etc., or an alloy consisting of any of these metalsand a low work function metal. Furthermore, stable electrodes can alsobe obtained with a high electron injection efficiency kept, by doping aslight amount of a low work function metal into the thin film layer oforganic electroluminescent elements or forming a layer of a metal saltsuch as lithium fluoride thinly on the thin film layer beforehand, andsubsequently forming second electrodes of a relatively stable metal. Themethod for forming the second electrodes is not especially limitedeither as far as it is a dry process such as resistance heatingevaporation, electron beam evaporation, sputtering evaporation or ionplating.

[0063] The thin film layer contained in the organic electroluminescentelements can be any of 1) hole transport layer/emitting layer, 2) holetransport layer/emitting layer/electron transport layer, 3) emittinglayer/electron transport layer and 4) a emitting layer with the abovelayer constituting materials mixed in a layer. That is, as far as anemitting layer composed of an organic compound exists as an elementcomponent, a multilayer laminate structure of any one of the above 1) to3) or a one emitting layer containing luminescent materials alone orluminescent materials, hole transport material and electron transportmaterial as in 4) can be used.

[0064] The hole transport layer is formed by a hole transport materialalone or a hole transport material and a high molecular binder.Preferable hole transport materials include low molecular compounds, forexample, triphenylamines such asN,N′-diphenyl-N,N′-di(3-methylphenyl)-1,1′-diphenyl-4,4′-diamine (TPD)and N,N′-diphenyl-N,N′-dinaphthyl-1,1′-diphenyl-4,4′-diamine (NPD),heterocyclic compounds such as N-isopropylcarbazole, pyrazolinederivatives, stylbene compounds, hydrazone compounds, oxadiazolederivatives and phthalocyanine derivatives, and polymers such aspolycarbonates with any of said low molecular compounds at the sidechains, styrene derivatives, polyvinylcarbazole and polysilanes.

[0065] In the application as a passive matrix type electroluminescentdevice, the respective organic electroluminescent elements are short inluminescent time, and it is required to emit light at a high luminancemomentarily by feeding pulse currents. In this case, the hole transportmaterial is required to have not only excellent hole transportabilityand stable film formability, but also good electron blocking propertyfor preventing the decline of luminescence efficiency caused by the leakof electrons in the hole transport layer. To satisfy the aboveproperties in good balance, in the production method of the presentinvention, it is especially preferable to contain a step of forming anorganic layer of an organic compound containing the biscarbazolylstructure shown below.

[0066] Chemical formula:

[0067] where R and R are selected from hydrogen atom, alkyl groups,halogen atoms, aryl groups, aralkyl groups and cycloalkyl groups.Furthermore, the carbazolyl structure can be connected with one or moresubstituent groups selected from alkyl groups, aryl groups, aralkylgroups, carbazolyl group, substituted carbazolyl groups, halogen atoms,alkoxy groups, dialkylamino groups and trialkylsilyl groups.

[0068] Preferable luminescent materials include low molecular compoundssuch as anthracene derivatives, pyrene derivatives,8-hydroxyquinolinealuminum derivatives, bisstyrylanthracene derivatives,tetraphenylbutadiene derivatives, cumarine derivatives, oxadiazolederivatives, distyrylbenzene derivatives, pyrrolopyridine derivatives,perinone derivatives, cyclopentadiene derivatives, oxadiazolederivatives and thiadiazolopyridine derivatives respectivelyconventionally known as light emitters, and polymers such aspolyphenylenevinylene derivatives, polyparaphenylene derivatives andpolythiophene derivatives. Preferable dopants to be doped into theemitting layer include rubrene, quinacridone derivatives, phenoxazonederivatives, DCM, perinone derivatives, perylene derivatives, cumarinederivatives and diazaindacene derivatives, etc.

[0069] It is preferable that the electron transport material has largeelectron affinity, large electron mobility and stable thin filmformability, since it is required to efficiently transport the electronsinjected from cathodes. Preferable materials satisfying these propertiesinclude 8-hydroxyquinonealuminum derivatives,hydroxybenzoquinoneberyllium derivatives, oxadiazole derivatives such as2-(4-biphenyl)-5-(4-t-butylphenyl)-1,3,4-oxadiazole (t-BuPBD),1,3-bis(4-t-butylphenyl-1,3,4-oxadizolyl)biphenylene (OXD-1) and1,3-bis(4-t-butylphenyl-1,3,4-oxadizolyl)phenylene (OXD-7), triazolederivatives, phenanthroline derivatives, etc.

[0070] The materials used for the hole transport layer, emitting layerand electron transport layer can respectively singly form the respectivelayers, but can also be dispersed into any high molecular binder, forexample, a solvent soluble resin such as polyvinyl chloride,polycarbonate, polystyrene, poly(N-vinylcarbazole), polymethylmethacrylate, polybutyl methacrylate, polyester, polysulfone,polyphenylene oxide, polybutadiene, hydrocarbon resin, ketone resin,phenoxy resin, polysulfone, polyamide, ethyl cellulose, vinyl acetate,ABS resin or polyurethane resin, or a setting resin such as phenolresin, xylene resin, petroleum resin, urea resin, melamine resin,unsaturated polyester resin, alkyd resin, epoxy resin or silicone resin.

[0071] The methods for forming the hole transport layer, emitting layer,electron transport layer, etc. are not especially limited and can beresistance heating evaporation, electron beam evaporation, sputteringevaporation, etc. However, generally such methods as resistance heatingevaporation and electron beam evaporation are preferable in view ofproperties. The thicknesses of the organic layers cannot be limitedsince they relate to resistance values, but are practically selected ina range of 10 to 1000 nm.

[0072] Furthermore, the hole transport layer and the electron transportlayer can also be wholly or partially made of an inorganic material.Preferable materials include inorganic semiconductive materials such assilicon carbide, gallium nitride, zinc selenide and zinc sulfide.

[0073] The production method of the present invention comprises thesteps of forming spacers having a height at least partially exceedingthe thickness of said thin film layer, and vapor-depositing a materialfor patterning while a shadow mask having reinforcing lines formedacross its apertures is kept in contact with said spacers. For example,as shown in FIG. 3 which is a cross sectional view along II-II′ of FIG.1, spacers 4 having a height exceeding the thickness of a thin filmlayer 10 are formed on a substrate 1. After forming the thin film layer,etc., a shadow mask having reinforcing lines 33 as shown in FIG. 4 andFIG. 5 which is a sectional view along I-I′ of FIG. 4 is kept in contactwith the spacers, while a deposit is deposited for patterning secondelectrodes 8 as shown in FIG. 6 and FIG. 7 which is a side view of FIG.6. In this case, since the shadow mask is kept in contact with thespacers, it can be prevented that the thin film layer is flawed.Furthermore, since a clearance 36 exists between one face 35 of the maskportion 31 of the shadow mask and the reinforcing lines, the deposit canbe deposited behind the reinforcing lines using the clearance, forpatterning without dividing the second electrodes by the reinforcinglines. In reference to this method for producing an organicelectroluminescent device, the present invention is described below indetail.

[0074] At first, first electrodes 2 on a substrate 1 are patterned inform as shown in FIG. 8. The patterning method can be any publicly knowntechnique, and is not especially limited. Therefore, the firstelectrodes can also be formed on the substrate by a patterning method ofusing a shadow mask having reinforcing lines of the present invention,but in general, the first electrode layer formed on the entire surfaceof a substrate can be patterned by photolithographic etching. Thepattern of the first electrodes is not especially limited, and theoptimum pattern suitable for the intended application can be selected.Furthermore, the patterning of first electrodes can be effected asrequired, and for example, if only one first electrode is used as acommon electrode in a segment type electroluminescent device, thepatterning of first electrodes is not required.

[0075] Then, as shown in FIG. 9, spacers 4 with a height exceeding thethickness of the thin film layer are formed to be positioned between thesecond electrodes to be formed later. In the production method of thepresent invention, it is necessary to form spacers with a height atleast partially exceeding the thickness of the thin film layer on thesubstrate, for preventing that the shadow mask flaws the thin film layerformed on the substrate when the substrate and the shadow mask are keptin contact with each other. The height of the spacers is not especiallylimited, but considering the decline of pattern accuracy caused by thedeposit straying into the clearance formed between the shadow mask andthe substrate by the spacers, the height is usually in a range from 0.5to 100 μm.

[0076] The positions where the spacers are formed are not especiallylimited, but it is preferable to locate the spacers mainly in thenon-luminescent regions in the organic electroluminescent device tominimize the loss of the emitting area. The spacers are not especiallylimited in structure and can be formed by one layer or a plurality oflayers. For example, as shown in FIGS. 10 to 12, relatively thin firstspacers 3 can be formed between the first electrodes 2, and secondspacers 4 with a height exceeding the thickness of the thin film layercan be formed between the second electrodes 8 in the directionperpendicular to the first electrodes 2. Furthermore, the first spacers3 can be formed so that they cover the ends of the first electrodes, tofunction as an inter-layer insulation layer, as shown in FIGS. 13 to 15.As a further other method, the first spacers can be formed as a matrix,and the second spacers 4 can be formed to partially overlap the firstspacers. As a still further other method, a plurality of dot spacers canbe arranged on the substrate. The spacers are not especially limited insectional form.

[0077] Since the spacers are mostly formed in contact with the firstelectrodes, it is preferable that they have sufficient electricinsulation performance. Conductive spacers can also be used, but in thiscase, electrically insulating portions are required to be formed forpreventing the shortcircuiting between electrodes. For the spacers,publicly known materials can be used. Inorganic materials which can bepreferably used as the spacers include oxide materials such as siliconoxide, glass materials, ceramic materials, etc., and organic materialswhich can be used include polymer resins such as polyvinyl resins,polyimide resins, polystyrene resins, acrylic resins, novolak resins andsilicone resins. Furthermore, if the spacers are blackened wholly or atthe portions in contact with the substrate or first electrodes, thespacers can have a black matrix function contributing to the improvementof display contrast. Spacer materials which can be preferably used inthis case include inorganic materials such as silicon, gallium arsenide,manganese dioxide, titanium oxide and a laminate film of chromium oxideand metal chromium, and organic materials such as mixtures obtained byadding any of pigments and dyes based on carbon black, phthalocyanine,anthraquinone, monoazo, disazo, metal complex salt type monoazo,triallylmethane, aniline, etc. and treated on the surfaces to improveelectric insulation performance, or any of powders of said inorganicmaterials, to any of said resins.

[0078] The method for forming the spacer layer is not especiallylimited, and can be a dry process such as resistance heatingevaporation, electron beam evaporation or sputtering evaporation when aninorganic material is used, or can be a wet process such as spincoating, slit die coating or dip coating when an organic material isused.

[0079] The spacer patterning method is not especially limited, but inview of process, it is easy to form a spacer layer on the entire surfaceof the substrate after patterning the first electrodes, and then to usea publicly known photolithographic method for patterning. The spacerscan also be patterned by etching or lifting off using a photoresist.Furthermore, a photosensitive spacer material obtained by making any ofsaid resins photosensitive can be used to directly expose and developthe spacer layer for patterning.

[0080] The method for forming the thin film layer is described below. Atfirst, a hole transport layer 5 is formed on the substrate with spacersformed on it as shown in FIG. 9. In this case, it is only required tovapor-deposit a hole transport material 11 in the entire area whereluminescent regions exist as shown in FIG. 16.

[0081] The emitting layer is patterned as described below. The shadowmask used is shown in FIG. 17. The mask portion 31 has apertures 32formed to correspond to the respective luminescent regions of theemitting layer, and to prevent the deformation of the apertures,reinforcing lines 33 are formed on the same plane as the mask portion,to cross the apertures for preventing the deformation of the apertures.Furthermore, the shadow mask is fixed on a frame 34 to allow easyhandling. Then as shown in FIG. 18 and FIG. 19 which is a side view ofFIG. 18, the shadow mask is brought into contact with the spacers 4,while relatively positioning the first electrodes 2 and the apertures 32to ensure that the spacers 4 overlie on the reinforcing lines 33. Thatis, the reinforcing lines are kept in contact with the spacers. If aluminescent material 12 is vapor-deposited in this state, a emittinglayer 6 (B regions of the emitting layer, in this case) is formed ondesired regions. This action is repeated three times, for patterning therespective R, G and B regions of the luminescence layer 6 over the firstelectrodes as shown in FIG. 20. The shadow mask used for patterning theemitting layer is not limited to the mask shown in FIG. 17. For example,the shadow mask used for patterning the second electrodes shown in FIG.4, etc. can also be used for patterning.

[0082] Since the shadow mask contacts the spacers without flawing thethin film layer, it does not happen that the properties of the organicelectroluminescent elements are degraded, and furthermore, the substrateand the shadow mask can be easily relatively positioned.

[0083] The emitting layer can be patterned by using shadow masks as manyas the number of colors of the emitting layer, but when the sameluminescence pattern is repetitively formed as in a matrix typeelectroluminescent device, the respective color regions of the emittinglayer can be patterned by shifting the relative positions of one shadowmask and the substrate.

[0084] The shadow mask is not especially limited in structure. However,it is preferable that the reinforcing lines are arranged at theapertures to ensure that the reinforcing lines agree with the highportions of the spacers exceeding the thickness of the thin film layerfor avoiding that any portions behind the reinforcing lines exist in theluminescent regions.

[0085] The reinforcing lines are not especially limited in width, but itis preferable that the width is smaller than the width of the portionswhere no emitting layer exists, i.e., the non-luminescent regions in theorganic electroluminescent device. Therefore, it is preferable that thewidth of reinforcing lines is smaller than 50 μm. Smaller than 30 μm ismore preferable. In view of the form integrity of the shadow mask, it isdesirable that the thickness of the mask portion is larger, but to keepthe width of reinforcing lines smaller, it is preferable that thethickness is more than about one half to less than about 3 times thewidth of reinforcing lines.

[0086] The plane sizes of the first electrodes and the luminescentregions of the emitting layer are not especially limited, but fordecreasing the possibility of the shortcircuiting between the firstelectrodes and the second electrodes, it is preferable that theluminescent regions of the emitting layer are larger than the exposedportions of the first electrodes corresponding to the respectiveluminescent regions. In the passive matrix type electroluminescentdevice shown in FIGS. 1 to 3, the practical typical crosswise pitch ofrespective luminescent regions can be, for example, 100 μm. In thiscase, if the width of each first electrode is 70 μm, it is preferable toset the widths of each luminescent region of the emitting layer and eachaperture at values close to 100 μm equal to the pitch, to ensure thatthe widths of the luminescent region and the aperture are larger thanthe width of the first electrode and that the luminescent region and theaperture do not overlap the adjacent first electrodes.

[0087] To produce a monochromatic electroluminescent device, thepatterning of the emitting layer can be omitted. In this case, as in themethod shown in FIG. 16, the emitting layer can be formed by depositinga luminescent material in the entire area where the luminescent regionsexist.

[0088] For the electron transport layer, an electron transport material13 is deposited on the entire area where the luminescent regions exist,to form the electron transport layer 7, as shown in FIG. 21.Furthermore, if an electron transport material is deposited continuouslyin the step of patterning the emitting layer shown in FIGS. 18 and 19,the electron transport layer 7 can also be patterned to correspond tothe respective R, G and B regions of the emitting layer 6 as shown inFIG. 22. The method for forming the electron transport layer is notespecially limited. However, even if any region where no emitting layerexists on any first electrode for example since a foreign matter isdeposited on the shadow mask, the electron transport material depositedon the entire area allows the region to be covered with an electrontransport layer, for effectively preventing that the organicelectroluminescent element from being greatly degraded in properties.So, it is preferable to form the electron transport layer by the formermethod. In this case, to prevent the change of luminescent colors due tothe migration of energy from the emitting layer to the electrontransport layer, it is preferable to use an electron transport materialwith a luminescence energy equivalent to or larger than the largestluminescence energy among those of the respective color regions of theemitting layer. That is, in the structure of the electroluminescentdevice shown in FIG. 21, it is preferable to use an electron transportmaterial with a luminescence energy equivalent to or larger than that ofthe B regions of the emitting layer, for forming the electron transportlayer 7.

[0089] The above step of forming the hole transport layer or electrontransport layer can be omitted, depending on the structure of the thinfilm layer contained in the organic electroluminescent element.

[0090] The method for patterning the second electrodes is describedbelow. The shadow mask used is shown in FIGS. 4 and 5. The mask portion31 is provided with apertures 32 formed to correspond to the secondelectrodes, and to prevent the deformation of the apertures, reinforcinglines 33 exist across the apertures. Furthermore, between one face 35 ofthe mask portion and the reinforcing lines, a clearance 36 exists.Moreover, the shadow mask is fixed on a frame 34 to allow easy handling.Then, the shadow mask is brought into contact with the spacers 4 bypositioning to ensure that the spacers 4 overlie on the mask portion 31.If a second electrode material 14 is vapor-deposited in this state, thesecond electrodes 8 are formed at desired regions. The second electrodematerial flying from the reinforcing lines 33 goes into the portionsbehind the reinforcing lines because of the clearance 36, and it doesnot happen that the second electrodes are divided by the reinforcinglines.

[0091] Since the shadow mask contacts the spacers, without flawing thethin film layer, the properties of the organic electroluminescentelements are not degraded, and the substrate and the shadow mask can beeasily relatively positioned.

[0092] It is preferable to pattern the second electrodes by one step ofvapor deposition as described above. However, the number of steps is notespecially limited. The second electrodes can also be patterned by aplurality of vapor deposition steps by using a plurality of shadow masksor by relatively shifting one shadow mask and the substrate in position.

[0093] The vapor deposition conditions of the second electrode materialare not especially limited. Vapor deposition from one evaporation sourcecan be adopted, but to make the second electrodes less likely to bedivided by reinforcing lines, it is effective to evaporate the secondelectrode material in a plurality of different directions in referenceto the reinforcing lines, for ensuring that the second electrodematerial goes behind the reinforcing lines. For manifesting such aneffect, when a high vacuum process such as vacuum evaporation in whichthe deposit is emitted straight from one or more evaporation sources tothe substrate is used, it is preferable in view of process to evaporatethe second electrode material from a plurality of evaporation sources orto move or rotate the substrate relatively to one or more evaporationsources for depositing the second electrode material. Furthermore, a lowvacuum process such as sputtering evaporation is preferable since thesecond electrode material is likely to deposit behind the reinforcinglines by flying in random directions.

[0094] The positional relation between the spacers and the mask portionof the shadow mask is not especially limited. However, it is preferablethat the high portions of the spacers exceeding the thickness of thethin film layer exist above the mask portion of the shadow mask, i.e.,between the second electrodes as shown in FIG. 7, for such reasons thatsince the clearance between the substrate and the reinforcing linesbecomes effectively large, the amount of the second electrode materialgoing behind the reinforcing lines increases, to deposit the secondelectrode material in the relatively less rough regions of thesubstrate, for inhibiting the increase of the electric resistance of thesecond electrodes, and that depending on conditions, since the thin filmlayer is perfectly covered by the first electrodes or substrate, spacersand second electrodes, the degradation of the properties of the organicelectroluminescent elements due to the penetration of water into thethin film layer, etc. can be inhibited.

[0095] The shadow mask used for patterning the second electrodes is notlimited to the structure shown in FIG. 4 or FIG. 23, and for example,the reinforcing lines can also be arranged to form meshes. Furthermore,as shown in the sectional view of FIG. 24, the mask portion 31 may betapered, or as shown in the sectional view of FIG. 25, the reinforcinglines 33 can also be structurally integrated with the mask portion 31.

[0096] The thickness of the mask portion is not especially limited sincethe clearance between one face of the mask portion and the reinforcinglines becomes larger when the thickness is larger, the amount of thedeposit which goes behind the reinforcing lines increases. However,since it is difficult to accurately produce a shadow mask with a largethickness compared to the width of the mask portion, it is preferablethat the thickness of the mask portion is almost equal to the minimumwidth of the mask portion to less than about three times. It ispreferable that the width of the reinforcing lines is less than theheight of the clearance since thinner reinforcing lines allows more ofthe deposit to go behind the reinforcing lines basically. It ispreferable that the number of reinforcing lines is as small as possiblewithin a range to sufficiently prevent the deformation of apertures, forlessening the portions remaining behind the reinforcing lines.

[0097] As required, after the second electrode patterning step, apassivation layer can be formed or the luminescence regions can besealed by using a publicly known technique or the patterning techniquein the production method of the present invention.

[0098] It is preferable to pattern at least either the emitting layer orthe second electrodes of the organic electroluminescent device in theproduction method of the present invention, but the present inventiondoes not limit the structure of the shadow mask used for patterning.Therefore, for example, a shadow mask with a structure shown in FIG. 4in which the reinforcing lines do not contact the spacers can be used topattern the emitting layer while the second electrodes are patterned bya publicly known technique. Furthermore, a shadow mask in which thereinforcing lines 33 and the mask portion 31 are formed on the sameplane as shown in FIG. 26 can also be used, and as shown in FIG. 27 andFIG. 28 which is a side view of FIG. 27, the spacers 4 can be formed tobe relatively higher, to pattern the second electrodes 8 by using theclearance 36 formed between the reinforcing lines 33 and the thin filmlayer 10.

[0099] The preferable materials which can be used for the shadow maskinclude, though not limited to, metals such as stainless steel, copperalloys, nickel alloys and aluminum alloys, and photosensitive resinsprepared by making photosensitive publicly know resins such as polyvinylresins, polyimide resins, polystyrene resins, acrylic resins, novolakresins and silicone resins. The material of the mask portion of theshadow mask can be the same or different form the material of thereinforcing lines. Furthermore, if relatively highly flexible cushionportions 37 made of any of said resins are formed on the shadow mask onthe side kept in contact with the spacers as shown in FIG. 29, theeffect of preventing the damage to the spacers and the thin film layerwhen both are kept in contact with each other can be further improved.

[0100] In the production method of the present invention, it ispreferable that the shadow mask uses a magnetic material as at leasteither the mask portion or the reinforcing lines, to be kept in contactwith the spacers by magnetic force. In this case, the substrate can bemore uniformly and reliably kept in contact with the shadow mask, toimprove the patterning accuracy. The method for fixing the relativeposition of the substrate and the shadow mask after positioning and themethod for supporting the weight of the shadow mask are not especiallylimited, and either magnetic force or mechanical method can be used.

[0101] The preferable magnetic materials which can be used as at leasteither the mask portion or the reinforcing lines include metals such asiron alloys, cobalt alloys and nickel alloys, magnetic materials such ascarbon steel, tungsten steel, chromium steel, cobalt steel, KS steel, MKsteel, Alnico steel, NKS steel, Cunico steel, OP ferrite and Ba ferrite,rare earth element magnetic materials such as Sm—Co based materials andNd—Fe—B based materials, core materials such as silicon steel sheet,Al—Fe alloy, Mn—Zn ferrite, Ni—Zn ferrite and Cu—Zn ferrite, and dustcore materials produced by compressively molding a fine powder ofcarbonyl iron, Mo Permalloy or Sendust together with a binder. It ispreferable to prepare the shadow mask from a magnetic material sheet,but the shadow mask can also be produced from a sheet of a mixtureconsisting of a rubber or resin and a powder of any of said magneticmaterials. Furthermore, as required, the shadow mask can also beproduced from an already magnetized material, or a shadow mask producedcan also be magnetized.

[0102] As for the method for keeping the shadow mask in contact with thespacers by magnetic force, it is preferable to attract the shadow maskmade by using a magnetic material as at least either the mask portion orthe reinforcing lines, by a magnet located on the back side of thesubstrate of the organic electroluminescent device. However, since it isonly required that the shadow mask and one or more other objects attracteach other by magnetic force, the method is not limited to the above.For example, a shadow mask functioning as a magnet and a substrate madeof a magnetic material can be combined to let attractive force actbetween them, for improving the adhesion between them.

[0103] The magnet can be any publicly known permanent magnet orelectromagnet. It is not especially limited in form or size.Furthermore, while the shadow mask can be attracted using one magnet, aplurality of magnets can be bonded together or arranged side by side atpredetermined intervals, to be used as a set. The distance between themagnet and the shadow mask and the magnitude of the magnetic forceacting between both are not especially limited as far as a sufficientmagnetic force acts on the shadow mask.

[0104] The method for producing the shadow mask is not especiallylimited, and any of mechanical grinding, sand blasting, sintering, laserprocessing, etc. can be used. However, the use of etching,electroforming or photolisography excellent in processing accuracy ispreferable. Above all, electroforming is an especially preferable shadowmask producing method since the mask portion can be formed to be thickrelatively easily.

[0105] In the production of the shadow mask, the mask portion and thereinforcing lines can be formed by one step, but the shadow mask canalso be produced by forming the mask portion and the reinforcing linesrespectively separately and overlapping them for connection. In thiscase, both can be connected by any method such as bonding, pressurebonding or welding, or if either of them is electrically conductive,they can be connected by electrodeposition. That is, the mask portionand the reinforcing lines kept in contact with each other are immersedin an electrolyte and energized to precipitate an electrodeposit at thecontact portions between them, for connecting them. In general, as theelectrodeposit, a metal such as nickel is selected, but an organicmaterial such as polyaniline can also be used. The shadow mask can alsobe produced by forming a photosensitive resin layer on a pre-formed maskportion, and patterning the photosensitive resin layer byphotolithography.

[0106] It is preferable that the shadow mask used in the productionmethod of the present invention has high flatness, to be uniformly keptin contact with the spacers on the entire surface of the substrate.However, since the shadow mask with a fine and highly precise pattern isnot so strong, it often occurs that the shadow mask becomes less flatduring the production of the shadow mask. In this case, the flatness ofthe shadow mask can be improved by using such a method as annealing.Furthermore, in view of handling convenience, the shadow mask is oftenfixed on a frame when used, and in this case, its flatness can beimproved by fixing the shadow mask on the frame while tensioning orheating it.

[0107] Moreover, as described before, it is basically preferable thatthe width of the reinforcing lines is smaller, but the handling of theshadow mask during the production of the shadow mask becomes difficultby that. Therefore, a shadow mask having reinforcing lines which has arelatively larger width can be produced, to narrow the reinforcing linesto a desired width later. In view of process, the line narrowing byetching is easy, but the method of line narrowing is not especiallylimited. Any proper method can be used to suit the material of theshadow mask.

[0108] The present invention is described below based on examples.

REFERENCE EXAMPLE

[0109] The methods for producing the shadow masks used in the followingexamples are described below.

[0110] The method for producing the shadow mask for the emitting layeris described below. At first, Ni—Co alloy was precipitated on a mothersubstrate by electroforming, to form a sheet with a margin of meshes 38connected around a mask portion 31 as shown in FIG. 35. Then, while thesheet was tensioned by using the margin of meshes, the mask portion wasoverlaid on a frame, and both were fastened using an adhesive. Finally,the margin of meshes extending beyond the frame was cut off, to producea shadow mask with high flatness for the emitting layer.

[0111] The method for producing the shadow mask for the secondelectrodes is described below in reference to FIG. 36. Beforehand, Nihad been precipitated on a mother substrate by electroforming, to formreinforcing lines of meshes. At first, (a) on the mother substrate 21with a pattern of photoresist 20, (b) Ni—Co alloy was precipitated toform a mask portion 31, and then (c) the photoresist only was removed.Subsequently (d) reinforcing lines 33 were overlapped on the maskportion with tension 22 applied to the reinforcing lines, and Ni wasprecipitated at the contact portions of both by electrodeposition, toconnect both. Furthermore, (e) with the tension kept, the connected maskportion and reinforcing lines were removed, and (f) and the mask portionwas overlaid on a frame 34, both being fixed using an adhesive. Finally,the portions of the reinforcing lines extending beyond the frame werecut off, to produce a shadow mask with high flatness for the secondelectrodes.

EXAMPLE 1

[0112] Shadow masks with a structure in which the mask portion and thereinforcing lines were formed on the same plane as shown in FIG. 17 wereprepared for patterning the emitting layer. Each of the shadow masks was120×84 mm in outside form and 25 μm in the thickness of the mask portion31, and had ninety two 64 mm long 305 μm wide apertures 32 formed instripes at a pitch of 900 μm in the crosswise direction. At theapertures formed in stripes, 20 μm wide and 25 μm thick reinforcinglines 33 across the apertures were formed at 1.8 mm intervals.Furthermore, the shadow mask was fixed on a 4 mm wide stainless steelframe 34 equal in outside form to the shadow mask.

[0113] A shadow mask with a structure in which a clearance 36 was formedbetween one face 35 of a mask portion 31 and reinforcing lines 33 asshown in FIGS. 30 and 31 was prepared for patterning the secondelectrodes. The shadow mask was 120×84 mm in outside form and 170 μm inthe thickness of the mask portion, and had sixty six 100 mm long and 770μm wide apertures 32 formed in stripes at a pitch of 900 μm in thecrosswise direction. On the mask portion, 45 μm wide and 40 μm thickreinforcing lines with a distance of 200 μm between respective oppositetwo sides were formed to form regular hexagonal meshes. The height ofthe clearance was 170 μm, being equal to the thickness of the maskportion. The shadow mask was fixed on a 4 mm wide stainless steel frame34 equal in outside form to the shadow mask.

[0114] The first electrodes were patterned as described below. An ITOglass substrate a with 150 nm thick transparent ITO electrode formed onthe surface of a 1.1 mm thick no-alkali glass substrate by sputteringevaporation (produced by Diomateck) was cut at a size of 120×100 mm. TheITO substrate was coated with a photoresist which was exposed anddeveloped to be patterned by ordinary photolithography. The unnecessaryportions of ITO were etched, and the photoresist was removed, to patternITO in 90 mm long and 270 μm wide stripes. As shown in FIG. 8, 272 firstelectrodes 2 were formed in stripes at a pitch of 300 μm in thecrosswise direction.

[0115] The spacers were formed as described below. Said ITO substratewas coated with a polyimide based photosensitive coating material(UR-3100 produced by Toray Industries, Inc.) by spin coating, andpre-baked at 80° C. for 1 hour in nitrogen atmosphere in a clean oven.Furthermore, the coating film was exposed to ultraviolet light through aphoto mask, to be photoset in the desired portions, and developed usinga developer (DV-505 produced by Toray Industries, Inc.). Finally, thepatterned coating film was baked at 180° C. for 30 minutes, and then at250° C. for 30 minutes in a clean oven, to form spacers 4 in thedirection perpendicular to the first electrodes as shown in FIGS. 1 to3. The transparent spacers had a length of 90 mm, width of 150 μm andheight of 4 μm, and 67 spacers were arranged at a pitch of 900 μm in thecrosswise direction. The spacers also had good electric insulationperformance.

[0116] The ITO substrate with the spacers formed was washed, and set ina vacuum evaporator. Three shadow masks for the emitting layer and oneshadow mask for the second electrodes respectively produced as describedabove were set in the vacuum evaporator. In the vacuum evaporator, thefour shadow masks could be exchanged to be positioned with the substratein vacuum at an accuracy of about 10 μm.

[0117] The thin film layer was formed as described below by vacuumdeposition based on resistance wire heating. The degree of vacuum duringvapor deposition was 2×10⁻⁴ Pa or less, and during vapor deposition, thesubstrate was rotated against the evaporation source.

[0118] At first, in the arrangement as shown in FIG. 16, copperphthalocyanine was vapor-deposited by 20 nm and bis(N-ethylcarbazole)was vapor-deposited by 200 nm on the entire surface of the substrate, toform a hole transport layer 5.

[0119] Then, a first shadow mask for the emitting layer was arrangedbefore the substrate, and both were kept in contact with each other.Behind the substrate a ferrite magnetic shell (YBM-1B produced byHitachi Metals, Ltd.) was arranged. In this case, as shown in FIGS. 18and 19, the first electrodes 2 formed in stripes were located at thecenters of the apertures 32 formed in stripes in the shadow mask, andthe reinforcing lines 33 agreed with the spacers 4 in position and werekept in contact with the spacers by positioning both the shadow mask andthe substrate. In this state, 8-hydroxyquinoline-aluminum complex (Alq₃)was vapor-deposited by 30 nm, to pattern the G regions of the emittinglayer. Subsequently, the R regions of the emitting layer were patternedas described for patterning the G regions of the emitting layer by usinga second shadow mask for the emitting layer and vapor-depositing Alq₃with 1 wt % of4-(dicyanomethylene)-2-methyl-6-(paradimethylaminostyryl)-4-pyran (DCM)doped by 30 nm. A third shadow mask for the emitting layer was not usedin this example, since the B regions of the emitting layer were notpatterned.

[0120] Furthermore, in the arrangement as shown in FIG. 21,4,4′-bis(2,2′-diphenylvinyl)biphenyl (DPVBi) was deposited by 90 nm andAlq₃ was deposited by 30 nm on the entire surface of the substrate, toform an electron transport layer 7 to be also used as the B regions ofthe emitting layer. Then, the thin film layer was exposed to lithiumvapor for doping (0.5 nm as film thickness).

[0121] The second electrodes were formed as described below by vacuumvapor deposition based on resistance wire heating. During vapordeposition, the degree of vacuum was 3×10⁻⁴ Pa or less, and thesubstrate was rotated against two evaporation sources.

[0122] As described for patterning the emitting layer, the shadow maskfor the second electrodes was arranged before the substrate, and amagnet was arranged behind the substrate. In this case, the shadow maskand the substrate were positioned to let the spacers 4 agree with themask portion 31 in position as shown in FIG. 7. In this state, aluminumwas vapor-deposited by a thickness of 400 nm, to pattern the secondelectrodes 8.

[0123] Finally in the arrangement as shown in FIG. 21, silicon monoxidewas deposited on the entire surface of the substrate by 200 nm byelectron beam evaporation, to form a passivation layer.

[0124] As described above, as typically shown in FIGS. 32 to 34, apassive matrix type color electroluminescent device was produced, inwhich the thin film layer 10 containing the R and G regions of theemitting layer 6 and the electron transport layer 7 also used as the Bregions of the emitting layer was formed by patterning on two hundredand seventy two 270 μm wide ITO first electrodes 2 formed in stripes ata pitch of 300 μm, and in which sixty six 750 μm second electrodes 8were formed in stripes at a pitch of 900 μm in the directionperpendicular to the first electrodes. Since three luminescent regionsof R, G and B regions form one pixel, the electroluminescent device had90×66 pixels at a pitch of 900 μm.

[0125] In this electroluminescent device, the electron transport layerwas formed on the entire surface of the substrate as shown in FIG. 33,in a structure to simplify the patterning steps and having an effect toprevent the degradation of properties of the electroluminescent deviceas described already. Furthermore, since three luminescent regions ofthree R, G and B colors were formed by two emitting layer patterningsteps, the structure allowed the number of patterning steps to bedecreased.

[0126] The respective second electrodes formed in stripes were notdivided by the reinforcing lines of the shadow mask, and weresufficiently low in electric resistance in the longitudinal directionover 100 mm. On the other hand, the respectively adjacent secondelectrodes in the crosswise direction were not shortcircuited at all,being perfectly insulated from each other.

[0127] The luminescent regions of the electroluminescent device emittedlight in respectively independent colors of R, G and B uniformly insizes of 270×750 μm. Furthermore, the decline of emitted light purity ofthe luminescent regions due to the straying of the luminescent materialsduring the patterning of the emitting layer was not observed.

[0128] Furthermore, when the electroluminescent device was drivenline-scanningly by a line-scanning drive circuit capable of dischargingthe charges accumulated in the circuit when the scanning line wasselectively changed, clear patterns could be displayed in multicolor.

EXAMPLE 2

[0129] The process till the formation of the hole transport layer wasthe same as described for Example 1.

[0130] Then, a first shadow mask for the emitting layer was arrangedbefore the substrate, and they were kept in contact with each other.Behind the substrate, a ferrite magnetic shell (YMB-1B produced byHitachi Metals, Ltd.) was arranged. In this case, as shown in FIGS. 18and 19, the shadow mask and the substrate were positioned to ensure thatthe first electrodes 2 formed in stripes were located at the centers ofthe apertures 32 formed in stripes in the shadow mask, and that thereinforcing lines 33 agreed with the spacers 4 in position and were keptin contact with the spacers. In this state, Alq₃ was vapor-deposited by30 nm, to pattern the G regions of the emitting layer. Then, asdescribed for patterning the G regions of the emitting layer, a secondshadow mask for the emitting layer was used to deposit Alq₃ with 1 wt %of DCM doped by 40 nm, for patterning the R regions of the emittinglayer. Furthermore, similarly, a third shadow mask for the emittinglayer was used to deposit DPVBi by 30 nm, for patterning the B regionsof the emitting layer.

[0131] The respective regions of the emitting layer were arranged forevery three first electrodes 2 formed in stripes as shown in FIG. 20, toperfectly cover the exposed portions of the first electrodes.

[0132] Furthermore, in the arrangement shown in FIG. 21, DPVBi wasdeposited by 90 nm and Alq₃ was deposited by 30 nm on the entire surfaceof the substrate, to form an electron transport layer 7. Then, the thinfilm layer 10 was exposed to lithium vapor, for doping (0.5 nm as thefilm thickness).

[0133] Subsequently, the second electrodes were patterned and apassivation layer was formed as described for Example 1.

[0134] As described above, as typically shown in FIGS. 1 to 3, a passivematrix type color electroluminescent device was produced, in which thethin film layer 10 containing the patterned R, G and B regions of theemitting layer 6 was formed on two hundred and seventy two 270 μm wideTIO first electrodes formed in stripes at a pitch of 300 μm, and inwhich sixty six 750 μm wide second electrodes 8 were formed in stripesat a pitch of 900 μm in the direction perpendicular to the firstelectrodes. Since three luminescent regions of R, G and B form onepixel, the electroluminescent device had 90×66 pixels at a pitch of 900μm.

[0135] In the electroluminescent device, as shown in FIG. 2, theelectron transport layer was formed on the entire surface of thesubstrate in a structure to simplify the patterning steps and having aneffect to prevent the degradation of properties of theelectroluminescent device already described before.

[0136] The second electrodes formed in stripes were sufficiently low inelectric resistance in the longitudinal direction as in Example 1, andperfectly free from shortcircuiting.

[0137] The luminescent regions of the produced electroluminescent deviceluminescentted light in respectively independent R, G and B colors insizes of 270×750 μm. Furthermore, the decline in the luminescenttedlight color purity of the luminescent regions due to the straying of theluminescent materials during patterning of the emitting layer was notobserved.

[0138] As described for Example 1, the electroluminescent device wasdriven line-scanning, and clear patterns could be displayed inmulticolor.

EXAMPLE 3

[0139] As described for Example 1, the ITO was patterned as firstelectrodes in 90 mm long and 280 μm wide stripes, and the photoresistwas removed. As described for Example 1, 272 first electrodes wereformed in strips on a glass substrate at a pitch of 300 μm in thecrosswise direction.

[0140] The spacers were formed as described below. Glycidyl methacrylatewas added to a copolymer consisting of 40% of methacrylic acid, 30% ofmethyl methacrylate and 30% of styrene by 0.4 equivalent for eachequivalent of the carboxyl groups of the copolymer for reaction, toobtain an acrylic copolymer with carboxyl groups and ethyleneunsaturated groups as side chains. Two hundred parts by weight ofcyclohexane were added to 50 parts by weight of the acrylic copolymer,20 parts of a bifunctional urethane acrylate oligomer (UX-4101 producedby Nippon Kayaku Co., Ltd.) as a photoreactive compound and 20 parts byweight of hydroxypivalate neopentyl glycol diacrylate (HX-220 producedby Nippon Kayaku Co., Ltd.) as an acrylic monomer, and the mixture wasstirred at room temperature for 1 hour, to obtain a resin solution. Tothe resin solution, 8 parts by weight of diethylthioxanthone (DETX-Sproduced by Nippon Kayaku Co., Ltd.) as a photopolymerization initiatorand 3 parts by weight of ethyl p-dimethylaminobenzoate (EPA produced byNippon Kayaku Co., Ltd.) as a sensitizer were added, and furthermore, amethyl ethyl ketone/methyl isobutyl ketone solution containing 30 wt %of an oil soluble azo chromium complex salt dye (3804T produced byOrient Kagaku) and phthalocycanine black pigment were added ascolorants. The mixture was stirred at room temperature for 20 minutes,to obtain a photosensitive black paste.

[0141] The photosensitive black paste was adjusted in concentration andapplied onto said ITO substrate by spin coating and pre-baked at 80° C.in nitrogen atmosphere for 5 minutes in a clean oven. Furthermore, saidcoating film was exposed to ultraviolet light through a photo mask, tobe photoset in the desired portions, and developed by 0.4 vol %2-aminoethanol aqueous solution. Finally the patterned coating film wasbaked in a clean oven at 120° C. for 30 minutes, to form first spacers 3in matrix as shown in FIGS. 13 to 15. The black spacers had a height of0.5 μm, and in regions of 270×750 μm free from these spacers, the firstelectrodes were exposed. The first spacers were formed so that theycover the 5 μm ends of the first electrodes.

[0142] Furthermore, the photosensitive black paste was used to formsixty seven 90 mm long, 130 μm wide and 4 μm high second spacers 4 at apitch of 900 μm in the crosswise direction on the first spacers in thedirection perpendicular to the first electrodes as shown in FIGS. 13 to15 according to similar photolisography. The two kinds of spacers hadgood electric insulation performance respectively.

[0143] As described for Example 1 except the above operation, a passivematrix type color electroluminescent device as typically shown in FIGS.13 to 15 was produced. Since three emitting areas of R, G and B form onepixel, the electroluminescent device had 90×66 pixels at a pitch of 900mm.

[0144] The second electrodes formed in stripes were sufficiently low inelectric resistance in the longitudinal direction as in Example 1 andperfectly free from shortcircuiting.

[0145] The luminescentluminescent regions of the producedelectroluminescent device emitted light in respectively independentcolors of R, G and B in sizes of 270× 750 μm. The decline in luminescentcolor purity of the luminescent regions due to the straying ofluminescent materials during patterning of the emitting layer was notobserved either.

[0146] As in Example 1, when the electroluminescent device was drivenline-scanningly, clear patterns could be displayed in multicolor.Furthermore, since black spacers were formed around the luminescentregions, they functioned as a black matrix, to improve the displaycontrast compared to Examples 1 and 2.

COMPARATIVE EXAMPLE 1

[0147] A passive matrix type color electroluminescent device wasproduced as described for Example 1, except that spacers were notformed.

[0148] As in Example 1, the second electrodes formed in stripes were notdivided by the reinforcing lines of the shadow mask and weresufficiently low in electric resistance in the longitudinal directionover 100 mm, and the respectively adjacent second electrodes in thecrosswise direction were not shortcircuited at all. Furthermore, theluminescent regions emitted light in respectively independent colors ofR, G and B in sizes of 270×750 μm, and the decline in the luminescentcolor purity of the respective luminescent regions due to the strayingof luminescent materials during patterning of the emitting layer was notobserved either.

[0149] However, when the electroluminescent device was drivenline-scanningly, the existence of non-luminescent regions wasoutstanding and crosstalk occurred. So, clear patterns could not bedisplayed.

COMPARATIVE EXAMPLE 2

[0150] A passive matrix type color electroluminescent device wasproduced as described for Example 1, except that shadow masks used forthe emitting layer did not have the reinforcing lines though having theidentically formed apertures.

[0151] As in Example 1, the second electrodes formed in stripes were notdivided by the reinforcing lines of the shadow mask, and weresufficiently low in electric resistance in the longitudinal directionover 100 mm, and the respectively adjacent second electrodes in thecrosswise direction were not shortcircuited at all. The luminescentregions were formed in sizes of 270×750 μm.

[0152] However, due to the straying of the luminescent materials duringthe patterning of the emitting layer, the colors emitted in therespective luminescent regions had R, G and B mixed. Furthermore, due tothe thickness fluctuation of the emitting layer, the respectiveluminescent regions were uneven in luminance.

[0153] The electroluminescent device was driven line-scanningly. Clearpatterns could be displayed, but multicolor was obscure.

COMPARATIVE EXAMPLE 3

[0154] A passive matrix type color electroluminescent device wasproduced as described for Example 1, except that the shadow mask usedfor the second electrodes had no reinforcing lines formed in meshesthough having identically formed apertures.

[0155] However, the second electrodes formed in stripes varied greatlyin width in the longitudinal direction, and some second electrodes weredisconnected halfway in the longitudinal direction. Many respectivelyadjacent second electrodes in the crosswise direction were perfectlyshortcircuited. The luminescent regions were also very different insize. The electroluminescent device was driven line-scanningly, but nopattern could be displayed since the respectively adjacent secondelectrodes were shortcircuited.

EXAMPLE 4

[0156] For patterning the emitting layer, shadow masks with a structurein which the mask portion and the reinforcing lines were formed on thesame plane as shown in FIG. 17 were prepared. Each of the shadow maskswas 120×84 mm in outside form and had a thickness of 25 μm in the maskportion 31, having two hundred and seventy two 64 mm long and 105 μmwide apertures 32 formed in stripes at a pitch of 300 μm in thecrosswise direction. At the apertures formed in stripes, 20 μm wide and25 μm thick reinforcing lines 33 were formed across the apertures at 1.8mm intervals. Each of the shadow masks was fixed on a 4 mm widestainless steel frame 34 equal in outside form to the shadow mask.

[0157] For patterning the second electrodes, a shadow mask with astructure in which a clearance 36 was formed between one face 35 of themask portion 31 and the reinforcing lines 33 as shown in FIGS. 30 and 31was prepared. The shadow mask was 120×84 mm in outside form and had athickness of 100 μm in the mask portion, having two hundred 100 mm longand 245 μm wide apertures 32 formed in stripes at a pitch of 300 μm inthe crosswise direction. On the mask portion, 40 μm wide and 35 μm thickreinforcing lines with a distance of 200 μm between respectivelyopposite two sides were formed to form regular hexagonal meshes. Theheight of the clearance was 100 μm, being equal to the thickness of themask portion. Furthermore, the shadow mask was fixed on a 4 mm widestainless steel frame 34 equal in outside form to the shadow mask.

[0158] At first, as described for Example 1, first electrodes of ITOwere patterned in 90 mm long and 70 μm wide stripes. As shown in FIG. 8,816 first electrodes 2 were formed in stripes at a pitch of 100 μm inthe crosswise direction.

[0159] Then, according to photolithography as in Example 1, spacers 4were formed in the direction perpendicular to the first electrodes asshown in FIGS. 1 to 3. The spacers were 201 transparent spacers with alength of 90 mm, width of 60 μm and height of 4 μm formed at a pitch of300 μm in the crosswise direction. The spacers had good electricinsulation performance.

[0160] The above shadow masks were used to produce a passive matrix typecolor electroluminescent device as described for Example 1. In theelectroluminescent device, as typically shown in FIGS. 32 to 34, a thinfilm layer 10 containing an emitting layer 6 with patterned R and Gregions and an electron transport layer 7 also used as an emitting layerwith B regions was formed on the eight hundred and sixteen 70 μm wideITO first electrodes 2 formed in stripes at a pitch of 100 μm, and twohundred 240 μm wide second electrodes 8 were formed in stripes at apitch of 300 μm in the direction perpendicular to the first electrodes.Since three luminescent regions of R, G and B form one pixel, theelectroluminescent device had 272×200 pixels at a pitch of 300 μm. Thesecond electrodes formed in stripes were not divided by the reinforcinglines of the shadow mask, and were sufficiently low in electricresistance in the longitudinal direction over 100 mm. On the other hand,the respectively adjacent second electrodes in the crosswise directionwere not shortcircuited at all, being perfectly insulated.

[0161] The luminescent regions of the electroluminescent device emittedlight uniformly in respectively independent colors of R, G and B insizes of 70×240 μm. Furthermore, the decline in the luminescentted lightcolor purity of the luminescent regions due to the straying of theluminescent materials during patterning of the emitting layer was notobserved either.

[0162] The electroluminescent device was driven line-scanningly by aline-scanning drive circuit capable of discharging the chargesaccumulated in the circuit when the scanning line was selectivelychanged, clear patterns could be displayed in multicolor.

INDUSTRIAL AVAILABILITY

[0163] In the method for producing an organic electroluminescent deviceof the present invention, since the shadow mask is kept in contact withthe spacers having a height at least partially exceeding the thicknessof the thin film layer, the thin film layer is not flawed. So, theproperties of the organic electroluminescent elements are not degraded.This effect is especially large when magnetic force is used to improvethe contact between the substrate and the shadow mask or to relativelyposition both of them.

[0164] In addition, since the reinforcing lines are used to prevent theapertures of the shadow mask from being deformed, the fine patterning ofthe emitting layer, second electrodes, etc. by masking can be achievedat high accuracy.

[0165] Furthermore, as described in the method for patterning the secondelectrodes, since the deposit can be deposited also behind thereinforcing lines, patterning can be achieved at high accuracy evenunder conditions of various vapor deposition angles. Therefore, manyevaporation sources can be used for vapor deposition, and sputteringevaporation, etc. can also be used. So, the effect is especially largewhen uniform patterning in a wide area is intended.

[0166] Moreover, since any desired form can be patterned by one vapordeposition step, the number of production steps can be decreased.Furthermore, the electroluminescent device to be produced is not limitedin structure.

1. A method for producing an organic electroluminescent device which isprovided with first electrodes formed on a substrate, a thin film layeron the first electrode containing at least an emitting layer composed ofan organic compound and a plurality of second electrodes formed on thethin film layer, and has a plurality of luminescent regions on saidsubstrate, comprising a step of forming spacers having a height at leastpartially exceeding the thickness of said thin film layer on thesubstrate, and a step of vapor-depositing a deposit for patterning whilea shadow mask having reinforcing lines formed across its apertures iskept in contact with said spacers.
 2. A method for producing an organicelectroluminescent device according to claim 1 , wherein the shadowmask, of which at least either its mask portion or the reinforcing linesis made of a magnetic material, is brought into contact with the spacersby magnetic force.
 3. A method for producing an organicelectroluminescent device according to claim 1 , wherein the patterningis conducted by vapor-depositing the deposit also on the portions behindthe reinforcing lines.
 4. A method for producing an organicelectroluminescent device according to claim 1 , wherein the shadow maskhaving reinforcing lines not in contact with the spacers is used forpatterning the second electrodes.
 5. A method for producing an organicelectroluminescent device according to claim 1 , wherein the shadow maskhaving reinforcing lines in contact with the spacers is used forpatterning the emitting layer.
 6. A method for producing an organicelectroluminescent device according to claim 1 , wherein the firstelectrodes are formed in a plurality of stripes on the substrate withintervals in the crosswise direction, and the second electrodes arepatterned, by depositing a deposit on the portions behind thereinforcing lines, in a plurality of stripes with intervals in thecrosswise direction and in the direction perpendicular to the firstelectrodes.
 7. A method for producing an organic electroluminescentdevice according to claim 6 , wherein the spacers are formed along thefirst electrodes and between the first electrodes.
 8. A method forproducing an organic electroluminescent device according to claim 7 ,wherein the spacers are formed so that they cover the ends of the firstelectrodes.
 9. A method for producing an organic electroluminescentdevice according to claim 6 , wherein the spacers are formed so thatthey cross the first electrodes and locate between the secondelectrodes.
 10. A method for producing an organic electroluminescentdevice according to claim 1 , which comprises a step of forming anorganic layer composed of an organic compound containing biscarbazolylstructure as a part of the thin film layer.
 11. A method for producingan organic electroluminescent device according to claim 1 , wherein thespacers are at least partially blackened.